Mega sound wave cleaning

Home page

Mega sound wave cleaning

Mega sound vibration plate, used for assembling slot type mega sound cleaning equipment

Product Description
Functional Features
Application Area

- Commodity name: Mega sound wave cleaning
Mega sound vibration plate, used for assembling slot type mega sound cleaning equipment
- Vibrating plate material: 316L stainless steel, quartz
- Vibrating plate area: customizable
- Customizable mega sound cleaning tank
- Mega sound vibration plate that can be installed directly to the bottom of the cleaning tank, which facilitates secondary development;
- 1MHz ultra-high frequency ultrasonic wave, more refined sonication effect
- A uniform sound field, the sound intensity of the vibration plate surface can exceed 5W/cm 2
- Ultra-low cavitation effect, does not damage the surface of the device
- Excellent effect on small particles, obvious advantages in high-deep aspect ratio structure cleaning. After precise control of empty six bubbles, megasic sound waves can also be used for cleaning of fine wafer pattern structures.
● Corresponding wafer size: 6-8inch

● Liquid temperature range: 5-80℃

● Sensor: PZT

● Input power: 600-1200W;

● Removed particle diameter: ≤0.2μm

● Frequency: (800~1000)kHz;

● High-frequency vibration: cavitation effect is stronger and the effect is more delicate

● Working principle: Use liquid molecular acceleration to generate energy

● Good uniformity: uniform megasonic field, the sound intensity on the vibration plate surface can exceed 5W/cm2;

● High-precision cleaning degree: the megasonic emission sound field is evenly distributed, improving the cleaning uniformity;

● High corrosion resistance: resistant to various acid and alkali solutions and organic solvents;

● Unique transducer bonding technology, higher stability and durability;

● Adjustability: parameters such as vibration frequency and power can be adjusted according to different application requirements, which can adapt to the processing requirements of objects of different materials, shapes and pollution levels, improving the versatility and flexibility of the equipment
- CMP chemical mechanical polishing
- Pre-bonding cleaning
- Mask cleaning
- Development
- Removal of adhesive
- Lift-off metal stripping
- Wet etching
- Lens cleaning
- Precision cleaning of display screens and other microelectronics industries

Classification:

Key words:

COOKIES

Our website uses cookies and similar technologies to personalize the advertising shown to you and to help you get the best experience on our website. For more information, see our Privacy & Cookie Policy

COOKIES

required

These cookies are necessary for basic functions such as payment. Standard cookies cannot be turned off and do not store any of your information.

analyze

These cookies collect information, such as how many people are using our site or which pages are popular, to help us improve the customer experience. Turning these cookies off will mean we can't collect information to improve your experience.

Feature

These cookies enable the website to provide enhanced functionality and personalization. They may be set by us or by third-party providers whose services we have added to our pages. If you do not allow these cookies, some or all of these services may not function properly.

advertise

These cookies help us understand what you are interested in so that we can show you relevant advertising on other websites. Turning these cookies off will mean we are unable to show you any personalized advertising.

Business License