Online heater

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Online heater

Liquid Chemical Heating Control in Semiconductor Equipment

Product Features
Product Specification
Product Usage

- Commodity name: Online heater
Liquid Chemical Heating Control in Semiconductor Equipment
The PFA heating element directly contacts the liquid medicine or deionized water, ensuring maximum efficiency and rapid response.

It can essentially withstand temperatures up to 110°C and pressures as high as 0.3 kg at virtually any flow rate.

Ultra-pure water design
- 1. PFA wets the surface and responds quickly to heat
- 2. Low power density; ≤4 watts/square inch
- 3. Compact design, maximizing power output while minimizing footprint
- 4. The heater's height typically ranges from 5” to 20”, with a diameter of 4”.
- 5. Flexible solutions with multiple options, featuring diverse designs for voltage and power output.
Security features: Liquid level sensor, overheat thermocouple, Process Thermocouple

Options: Thermal cutoff, available with K-type or other thermocouples, level sensors, and RTD transmitters. Sensor

Heater modification tailored to the customer's current design

Classification:

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