Zhuhai’s first independently built 6-inch MEMS chip production line has been completed and put into operation.

On January 15, 2026, the first domestically built 6-inch MEMS chip production line in Zhuhai, invested and constructed by Yunji Xinguang (Zhuhai) Microelectronics Co., Ltd., was completed and put into operation in the Jinwan District. Located in the Dingjiawan area of Sanzao Town, Jinwan District, this production line is equipped with a complete set of processes—including lithography, thin-film deposition, etching, bonding, and testing—and is capable of achieving large-scale production of MEMS chips.

MEMS, or Micro-Electro-Mechanical Systems, are integrated chips or systems that combine mechanical structures with electronic circuits at the micrometer to millimeter scale. Relying on integrated circuit fabrication processes and incorporating specialized manufacturing techniques, MEMS enable mass production at low cost, allowing sensing, actuation, and control functions to be performed within extremely small dimensions.

This production line features a modular layout and an efficient workflow design, aimed at rapidly achieving process validation and stable mass production, thereby providing the company with independent manufacturing capabilities for its core products such as SMR filters and high-frequency quartz crystal oscillators. “With the shortest construction period and the fastest ramp-up speed,” Yunji Xinguang defines the “Zhuhai Speed” and “Jinwan Efficiency” of MEMS production-line construction in this way.

This production line, with a total investment exceeding 250 million yuan, is a comprehensive platform integrating R&D, pilot testing, and mass production. It is equipped with Class 100 and Class 1,000 cleanrooms as well as key equipment covering the entire process, thereby establishing complete MEMS chip manufacturing capabilities. It took only about one year to achieve a fully closed-loop, end-to-end production chain, filling a gap in Zhuhai’s MEMS chip manufacturing capabilities and vividly demonstrating the “Zhuhai Speed.”

Yunji Xinguang is deeply engaged in piezoelectric MEMS technology, having assembled an R&D team of over 40 members—more than 80% of whom hold doctoral or master’s degrees. The company has established a closed-loop R&D center in collaboration with Tianjin University, and has cumulatively filed over 30 patent applications, 8 of which have been granted. Its core products have been applied in critical fields such as low-Earth-orbit satellites and 5G communications, providing a local solution for the domestic substitution of high-end chips.

Yunjixin Guang was founded in November 2023 and has established a joint research center through deep collaboration with Tianjin University. Its technical team boasts extensive experience in MEMS R&D and industrialization. The company focuses on piezoelectric MEMS technology and has already developed four major product lines:

● SMR filtering chips—used in fields such as 5G/6G and satellite communications—have over 50 products available, with frequency coverage ranging from 1 GHz to 8.5 GHz.

● PMEMS Acoustic Sensors: Based on a self-developed IPP chip architecture, these sensors deliver performance comparable to traditional ceramic sensors while being smaller in size and offering higher reliability. They are suitable for applications such as hydrophones, ranging, and flow measurement.

● High-frequency quartz crystal oscillators: Utilizing our proprietary QMEMS technology, these oscillators can achieve frequencies ranging from 70 to 300 MHz. Among them, the 156.25 MHz model has already achieved domestic substitution for mainstream international models.

● High-precision pressure sensor: Target accuracy of 0.01% FS, suitable for industrial monitoring, high-end equipment, and other fields.

This successful connection has enabled Yunji Xinguang to complete a full-chain closed loop—from design and process development to manufacturing—significantly enhancing the company’s market responsiveness and product delivery capabilities, and laying a solid manufacturing foundation for the company to lead the market in its future rapid growth.

Yunji Xinguang (Zhuhai) Microelectronics Co., Ltd. was established on November 20, 2023. The company focuses on MEMS chip manufacturing and has independently built a 6-inch MEMS chip production line equipped with complete process capabilities—including lithography, thin-film deposition, etching, bonding, and testing—to enable large-scale production. With technological innovation at its core, the company is committed to promoting the localization of MEMS chips and is an important player in Zhuhai’s integrated circuit industry.