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Marangoni Dryer
Marangoni Dryer
- Process Step
- Application area
- 介绍
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- Commodity name: Marangoni Dryer
The Marangoni dryer is an innovative drying technology based on the Marangoni effect.
In semiconductor wafer manufacturing, the wafers need to be thoroughly dried after cleaning to prevent surface oxidation and the formation of water spots, which could affect chip performance and yield.
Since isopropyl alcohol (IPA) has a much lower surface tension than water (at 25°C, IPA’s surface tension is 20.9 × 10⁻³ N/m, while water’s surface tension is 72.8 × 10⁻³ N/m), a surface tension gradient forms on the sloped water surface, generating Marangoni convection. This causes the water to be “pulled back” to the water surface, achieving wafer drying.
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The Marangoni dryer can effectively dry wafers quickly and efficiently under relatively mild conditions, reducing particle contamination and surface damage. It is suitable for wafers of various sizes and can be used in the production of integrated circuits, large-scale integrated circuits, and other products.
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Marangoni drying technology, based on the Marangoni effect, utilizes the difference in surface tension between IPA and high-purity water to absorb water molecules from the wafer surface into the drying tank, thereby achieving wafer drying.
Marangoni drying technology, based on the Marangoni effect, utilizes the difference in surface tension between IPA and high-purity water to absorb water molecules from the wafer surface into the drying tank, thereby achieving wafer drying.
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