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Horizontal Quartz Tube Basket Cleaning Machine
Horizontal Quartz Tube Basket Cleaning Machine
- Process Step
- Application area
- 介绍
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- Commodity name: Horizontal Quartz Tube Basket Cleaning Machine
The horizontal quartz tube basket cleaning machine is designed for immersion cleaning of components such as quartz tubes, baskets, quartz plates, ignition guns, and bases.
step1：Pickling Tank
step2：Water Washing Tank
step3：Acid Storage Tank (optional) -
It serves industries including integrated circuits, packaging, photovoltaics, power semiconductors, compound semiconductors, and research fields.
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This fully automated machine offers both immersion cleaning and spray cleaning processes, making it versatile for multiple uses and compatible with cleaning quartz tubes, baskets, and other workpieces. It features an automatic liquid dispensing system for easy acid replacement.
It can clean quartz baskets and tubes of various sizes (8-inch/12-inch) using DIW, acid solutions, and other chemicals.
1. Robotic Arm Load Capacity: ≤50 kg (Maximum load capacity of robotic arm: 50 kg)
2. Cleaning Targets:
Maximum furnace tube size: ø 510 mm × L 1520 mm
Maximum quartz basket size: ø 345 mm × L 1385 mm
3. Cleaning Capacity: 1 quartz tube/basket per chamber per cleaning cycle
4. Equipment Components: The machine consists of a horizontal acid tank, horizontal water tank, robotic arm (hook), and other key components.
5.Safety Features: Includes acid discharge permission levels, acid discharge confirmation pop-ups, door lock interlocks, and emergency off (EMO) features.
6. Acid Tank Functions: Automatic liquid replenishment (controlled by level sensors), automatic tank lid, chemical circulation filtration, furnace tube rolling, independent sampling ports.
7. Fully automated process with multiple preset recipe options for simplified operation.
8. Optional SECS/GEM Interface
9. Leak Sensor Configuration
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This fully automated machine offers both immersion cleaning and spray cleaning processes, making it versatile for multiple uses and compatible with cleaning quartz tubes, baskets, and other workpieces. It features an automatic liquid dispensing system for easy acid replacement.
It can clean quartz baskets and tubes of various sizes (8-inch/12-inch) using DIW, acid solutions, and other chemicals.
1. Robotic Arm Load Capacity: ≤50 kg (Maximum load capacity of robotic arm: 50 kg)
2. Cleaning Targets:
Maximum furnace tube size: ø 510 mm × L 1520 mm
Maximum quartz basket size: ø 345 mm × L 1385 mm
3. Cleaning Capacity: 1 quartz tube/basket per chamber per cleaning cycle
4. Equipment Components: The machine consists of a horizontal acid tank, horizontal water tank, robotic arm (hook), and other key components.
5.Safety Features: Includes acid discharge permission levels, acid discharge confirmation pop-ups, door lock interlocks, and emergency off (EMO) features.
6. Acid Tank Functions: Automatic liquid replenishment (controlled by level sensors), automatic tank lid, chemical circulation filtration, furnace tube rolling, independent sampling ports.
7. Fully automated process with multiple preset recipe options for simplified operation.
8. Optional SECS/GEM Interface
9. Leak Sensor Configuration
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Technical Support Hotline: 86-13861996325
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4th Floor, Building 5, No. 2 Haiyang South Road, Chengnan Street, Rugao City, Jiangsu Province
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