Tank Module

Cleaning Equipment

Organic Cleaning Machine

Wet process organic solvent cleaning, touch human-machine or PC interface with PLC software control.

Final Cleaning Machine

Compatible with 6/8-inch cassette types.

EKC Clean

EKC Clean is used to remove residues and impurities after etching, particularly for eliminating contaminants left behind after copper etching.

RCA cleaning machine

Cleaning methods commonly used in semiconductor manufacturing processes

Horizontal Quartz Tube Basket Cleaning Machine

The horizontal quartz tube basket cleaning machine is designed for immersion cleaning of components such as quartz tubes, baskets, quartz plates, ignition guns, and bases.

Pre-Diffusion Clean

Pre-diffusion cleaning removes chemical residues and particles from the wafer surface. It helps protect the regeneration of the oxide layer.

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