Tank Module

Tank module

PTFE integral tank

Seamless design, one-piece molding, strong corrosion resistance, high temperature resistance, smooth surface

Constant temperature bath

Thermostatic baths provide precise temperature control, uniform circulation flow, and particle removal

QDR Tank

The QDR process module can quickly remove chemical residues on the substrate by using DIW

Ultrasonic tank

Ultrasonic tanks are designed to enhance the cleaning process of solvents or aqueous chemicals. Ultrasonic power adjustable

Quartz Tank

Able to maintain structural stability and precision, ensuring wafer cleanliness and integrity

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