Functional Module-Functional Module-KOSEN SEMI

Tank Module

Functional Module

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The QDR process module can quickly remove chemical residues on the substrate by using DIW

Ultrasonic tank

Ultrasonic tanks are designed to enhance the cleaning process of solvents or aqueous chemicals. Ultrasonic power adjustable

Quartz Tank

Able to maintain structural stability and precision, ensuring wafer cleanliness and integrity

Ultrasonic Cleaning

Cavitation effect, acceleration effect and direct flow effect generated by ultrasonic waves in liquids

Mega sound wave cleaning

Mega sound vibration plate, used for assembling slot type mega sound cleaning equipment

Chemical liquid circulation heater

No metal ion dissolution pollution, online heating type chemical liquid heating equipment

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Technical Support Hotline: 86-13861996325

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4th Floor, Building 5, No. 2 Haiyang South Road, Chengnan Street, Rugao City, Jiangsu Province

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