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Organic Cleaning Machine
Organic Cleaning Machine
- Process Step
- Application area
- 介绍
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- Commodity name: Organic Cleaning Machine
Wet process organic solvent cleaning, touch human-machine or PC interface with PLC software control.
- STEP 1:Ultrasonic tank
- STEP 2: Soaking tank
- STEP 3: Soaking tank
- STEP 4:QDR tank
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Used in wafer manufacturing for cleaning before and after thin-film deposition, before dry etching, after ion implantation, before and after grinding, before and after annealing, before and after polishing, as well as in chemical wet etching cleaning processes.
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- Photoresist Removal Equipment
- Development Equipment
The equipment applies wet process organic solvent cleaning, with a touch human-machine interface or PC interface controlled by PLC software. A robotic arm, designed to rotate 180 degrees, is used to transport wafers between process slots.
Multiple process slot modules are configured to enhance capacity output, improving the efficiency and control of the production process. The equipment is designed with various safety protection standards to address potential hazards for both the equipment and personnel, ensuring heightened safety measures.
Solution
Temperature Dissolving Property
Acetone Room Temperature Strong Isopropyl Alcohol Room Temperature Strong Anhydrous Ethanol Room Temperature Weak
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- Photoresist Removal Equipment
- Development Equipment
The equipment applies wet process organic solvent cleaning, with a touch human-machine interface or PC interface controlled by PLC software. A robotic arm, designed to rotate 180 degrees, is used to transport wafers between process slots.
Multiple process slot modules are configured to enhance capacity output, improving the efficiency and control of the production process. The equipment is designed with various safety protection standards to address potential hazards for both the equipment and personnel, ensuring heightened safety measures.
|
Solution |
Temperature |
Dissolving Property |
| Acetone | Room Temperature | Strong |
| Isopropyl Alcohol | Room Temperature | Strong |
| Anhydrous Ethanol | Room Temperature | Weak |
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