Tank Module

IPA Dryer

Pure water + IPA + hot nitrogen drying

SRD vertical spin dryer

The SRD spin dryer is an essential piece of equipment in the semiconductor manufacturing process.

SRD Horizontal Spin Dryers

Suitable for high-end wafer manufacturing processes that are sensitive to particle adsorption

SPM corrosion machine

SPM is a commonly used wet chemical solution for photoresist stripping

KOH Etching

KOH etching of silicon wafers depends on the concentration and temperature of the solution

Fully automatic etching machine

Etching has become a crucial step in semiconductor wafer manufacturing

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