Tank Module

Products

Marangoni Dryer

The Marangoni dryer is an innovative drying technology based on the Marangoni effect.

IPA Dryer

Pure water + IPA + hot nitrogen drying

SRD vertical spin dryer

The SRD spin dryer is an essential piece of equipment in the semiconductor manufacturing process.

SRD Horizontal Spin Dryers

Suitable for high-end wafer manufacturing processes that are sensitive to particle adsorption

SPM corrosion machine

SPM is a commonly used wet chemical solution for photoresist stripping

KOH Etching

KOH etching of silicon wafers depends on the concentration and temperature of the solution

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